Scope

This conference provides an opportunity for the presentation and discussion of the latest advances in modeling and simulation of semiconductor devices, processes, and equipment for integrated circuits.


Topics:

  1. Modeling and simulation of semiconductor devices
  2. Modeling and simulation of semiconductor processes
  3. Fundamental aspects of modeling and simulation
  4. Compact modeling for circuit simulation
  5. Process/device/circuit co-simulation
  6. Equipment, topography, lithography modeling
  7. Interconnect modeling
  8. Numerical methods and algorithms
  9. Metrology for modeling