This conference provides an opportunity for the presentation and discussion of the latest advances in modeling and simulation of semiconductor devices, processes, and equipment for integrated circuits.
Topics: - Modeling and simulation of semiconductor devices
- Modeling and simulation of semiconductor processes
- Fundamental aspects of modeling and simulation
- Compact modeling for circuit simulation
- Process/device/circuit co-simulation
- Equipment, topography, lithography modeling
- Interconnect modeling
- Numerical methods and algorithms
- Metrology for modeling
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