Scope
The conference provides an opportunity for the presentation of recent
advances in modeling and simulation of semiconductor devices, processes
and equipment for manufacturing.
Topics include
- Device simulation including quantum
effects and nanodevices in silicon and compound semiconductors
- Process modeling and simulation
including both continuum and atomistic approaches
- Equipment, topography and lithography
simulation
- Circuit modeling including interconnects
- Integration of process, device and
circuit simulation
- High performance computing and advanced
numerical methods
- Compact modeling and integration of
device/circuit simulation
- Simulation of mechatronical micro- and
nanodevices
- Calibration of models and verification
and benchmarking of simulators
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