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Tuesday, 25 September 2007

Session 2A: Process SImulation II

11:00 - 11:20 Modeling and Characterization of Advanced Phosphorus Ultra Shallow
Junction Using Germanium and Carbon Coimplants
L. P. Huang, K. C. Ku, Y. M. Sheu, C. F. Nieh, C. H. Chen, H. Chang, L. T. Wang, T. L. Lee, C. C. Wang, C. H. Diaz
11:20 - 11:40 Intrinsic Stress Build-Up During Volmer-Weber Crystal Growth
H. Ceric, A. Nentchev, E. Langer, S. Selberherr
11:40 - 12:00 Strain Energy Driven and Curvature Driven Grain Boundary Migration in 3D-IC Cu Vias
C. Awo-Affouda, M. O. Bloomfield, T. S. Cale
12:00 - 12:20 Modeling of Re-sputtering Induced Bridge of Tungsten Bit-Lines for
NAND Flash Memory Cell with 37nm Node Technology
B. Hwang, Y. Lee, J.-G. Min, H. Shin, N. Lim, S. Kim,
W.-Y. Chung, T.-K. Kim, J.-H. Park, Y.-K. Lee, D. Kwak, J. Park, W.-S. Lee
12:20 - 12:40 Efficient Mask Design for Inverse Lithograph Technology Based
on 2D Discrete Cosine Transformation (DCT)
J. Zhang, W. Xiong, M.-C. Tsai, Y. Wang, Z. Yu
12:40 - 13:00 Modeling of Deep Reactive Ion Etching in a Three-Dimensional Simulation Environment
A. Hoessinger, Z. Djuric, A. Babayan

Session 2B: Electronic Transport I

11:00 - 11:20 Comparison of Monte Carlo Transport Models for Nanometer-Size MOSFETs
C. Fiegna, M. Braccioli, S. C. Brugger, F. M. Bufler, P. Dollfus, V. Aubry-Fortuna, C. Jungemann, B. Meinerzhagen, P. Palestri, S. Galdin-Retailleau, E. Sangiorgi, A. Schenk, L. Selmi
11:20 - 11:40 Surface Roughness Scattering in Ultrathin-Body SOI MOSFETs
S. Jin, M. V. Fischetti, T.-W. Tang
11:40 - 12:00 Pearson Effective Potential Vs. Multi-Subband Monte-Carlo Simulation for Electron Transport in DG nMOSFET
M.-A. Jaud, S. Barraud, J. Saint-Martin, A. Bournel, P. Dollfus, H. Jaouen
12:00 - 12:20 Inclusion of the Pauli Principle in the Langevin-Boltzmann Equation for Bulk Systems
C. Jungemann
12:20 - 12:40 Energy Conservation in Collisional Broadening
Z. Aksamija, U. Ravaioli
12:40 - 13:00 A Simple Technique for the Monte Carlo Simulation of Transport in Quantum Wells
J. Kim, C.-Y. Chen, R. W. Dutton