Scope and Topics

Scope:

 The Conference provides an opportunity for the presentation of latest advances in modeling and simulation of semiconductor devices, processes and circuits. Special emphasis is placed on practical applications.

Topics:

- Back-end modeling and simulation including equipment optimization

- Process modeling and simulation based on macroscopic as well as atomistic approaches

- Optimization methods for process variation

- All sorts of advanced device simulations including comparison with real world

- Compact modeling for advanced devices and parameter extraction methods

- Interconnect modeling including high frequency applications

- Reliability modeling for fabrication processes

- Advanced numerical methods and algorithms

- Methods for characterizing properties of advanced materials